14

Preface

Year:
2013
Language:
english
File:
PDF, 80 KB
english, 2013
27

Characterization of silicon oxynitride gas barrier films

Year:
2002
Language:
english
File:
PDF, 198 KB
english, 2002
33

Silicon oxide gas barrier films deposited by reactive sputtering

Year:
2003
Language:
english
File:
PDF, 1.57 MB
english, 2003